10.硼化物靶材：硼化镧靶材LaB6、硼化铈靶材CeB6、硼化铽靶材TbB6、硼化铕靶材EuB6、硼化钐靶材SmB6、硼化铪靶材HfB、硼化钛靶材TiB、硼化铬靶材CrB、硼化钒靶材VB、硼化锆靶材ZrB、硼化铁靶材FeB、硼化钽靶材TaB、硼化铌靶材NbB、硼化镍靶材NiB、硼化钼靶材MoB、硼化硅靶材SiB、硼化铝靶材AlB、硼化镁靶材MgB、硼化钡靶材BaB、硼化钨靶材WB、硼化钴靶材CoB、硼化钙靶材CaB、硼化镍靶材NiB.